用于移动维护应用的泄漏探测器
袖珍型泄漏探测器是我们为满足移动性起到关键作用情况下任何维护作业需要而给出的解决方案。
With these applications in mind, it is important that the leak detectors used are compact, lightweight and portable.
就此等应用而言，记住所用泄漏探测器是紧凑的、轻型的和袖珍型的是重要的。
Our ASM 310 and MiniTest portable leak detectors, weighing in at 21 kg and 5 kg respectively, are more than 50 % lighter than conventional units.
我们的ASM 310 泄漏探测器和微型检验袖珍型泄漏探测器，其重量分别为21kg和5kg，要比传统装置轻50%以上。
They have universal mains connections to allow them to be used in any part of the world.
它们都有通用的电源接头，使之可以用于全世界的任何地方。
Transport boxes are available as accessories to even allow these units to be taken on a plane, typically when leak detection jobs are carried out by service engineers who are called upon to work all over the world.
运输盒体作为辅件也是可获的，使此等装置可以在飞机上携带，特别是在泄漏探测作业需要由响应全球各个地方呼叫的服务工程师予以解决的情况下。
Innovative technologies are what distinguish our leak detectors.
创新技术使我们的泄漏探测器与众不同。
They are equipped with graphic color displays and are easy to operate from a detachable control panel or from a distance using a remote control.
它们配备了图形化彩色显示器，易于在一个可分拆的控制面板或者远程控制器上进行操作。
The menu navigation is user-friendly and easy to operate.
菜单导航是用户友好型的，而且易于操作。
The ASM 310 Leak Detector: compact design and high performance The ASM 310 portable leak detector stands out particularly due to its smart design with a retractable handle and its small footprint.
ASM 310泄漏探测器：紧凑设计和高级性能
ASM 310 泄漏探测器之所以如此出众，尤其得归功于其智能设计，体现在有一个可伸缩的手柄和较小占用空间。
At only 21 kg it is still a complete vacuum system, it has the same detector technology and offers the same level of sensitivity as larger models.
虽然仅有21kg，它仍然是一个完整的真空系统，具有同样的探测器技术，并提供与较大型号装置同样水平的敏感度。
Thanks to the clean, oil-free pumping system, the ASM 310 is the right choice for leak detection in systems which do not tolerate any contamination.
归功于清洁的无油泵送系统， ASM 310对不允许有任何污染的系统的泄漏探测是正确选择。
It provides high performance in leak testing where mobility is crucial.
在移动性起到关键作用的情况下，它能提供泄漏检验的高性能。
The ASM 310 can be operated in any position and has an integrated SD memory card for data recording.
ASM 310可以在任何位置进行操作，带有一个集成的SD记忆存储卡，可用于数据记录。
In addition to data, configurations and operating parameters can be documented using the SD card and can be downloaded or transferred to other devices.
除数据外，配置和操作参数也可以使用该SD卡予以记录，并被下载或传输到其他装置。
 
The intuitive menu can be individually adapted and protected with a password.
直观的菜单可以是个别适合的，并有密码保护。
This prevents unauthorized changes from being made to the settings.
这就能够阻止对有关设置进行未经授权的更改。
The portable MiniTest combines innovative technology with ultralight weight The MiniTest portable helium leak detector weighs only a sensational 5 kg!
袖珍型微型检验探测器将创新性技术和超轻重量组合在一起。袖珍型微型氦气泄漏探测器重量只有惊人的5kg！
It is the first vacuum leak detector on the market which works with a quartz window sensor.
Thanks to this innovative technology, it stands out due to its lightweight design and small footprint.
它是市场上第一种以石英窗口传感器配合工作的真空泄漏探测器。归功于这种创新性技术，它才如此与众不同，体现在轻型重量设计和很小占用空间。
The uncomplicated operation and optional wireless remote control enable helium leak detection to be carried out even in large systems by only one person.
无复杂可言的操作和可选无线远程控制使得氦气泄漏探测可以由一位工作人员即使是在大型系统内进行作业。
The MiniTest can work at a high inlet pressure of up to 200 mbar and is not sensitive to water vapor.
微型检验探测器可以在高进气压力（可高达200 bar）的情况工作，而且不对水蒸汽具有敏感性。
This makes it the ideal solution for leak detection in power plants, vacuum furnaces and vacuum systems as well as in heat exchangers.
这使它成为电厂、真空炉、真空系统以及热交换器应用场合泄漏探测的理想解决方案。
The data recording function on the remote control via USB interface makes this unit a user-friendly data logger.
通过USB接口实现的位于远程控制器上数据记录功能使该装置成为用户友好型的数据记录员。
Since it is practically maintenance-free, it is also cost-efficient both in operation and in long-term use.
因为它实际上是无须维护的，所以在运行当中以及长期使用过程中，它都是成本效益很高的。
The leak detectors in our ASM 340 series guarantee top performance in vacuum or sniffing leak detection for various applications, from maintenance to applications in small production environments.
我们的ASM 340 泄漏探测器确保各种应用场合下（在小型生产环境从维护到应用）在真空或嗅闻泄漏探测方面的顶级性能。
These dependable leak detectors can be used both for qualitative localization of leaks as well as quantitative global or local testing.
此等可靠的泄漏探测器可用于泄漏的定量化位置，也可以用于全球的或本地的定量化检验。
Multipurpose leak detectors by PV combine high performance and easy operation with the reliability which you have come to expect.
PV的多用途泄漏探测器将高性能、易操作和您期待的可靠性组合在一起。
ASM 340 - the best in class compact multipurpose leak detectors The leak detectors in our ASM 340 series guarantee top performance in vacuum or sniffing leak detection for various applications, from maintenance to applications in small production environments.
ASM 340 – 系紧凑多用途泄漏探测器类别中最好的。我们ASM 340 系列的泄漏探测器确保各种应用场合下（在小型生产环境从维护到应用）在真空或嗅闻泄漏探测方面的顶级性能。
 
These dependable leak detectors can be used both for qualitative localization of leaks as well as quantitative global or local testing.
此等可靠的泄漏探测器可用于泄漏的定量化位置，也可以用于全球的或本地的定量化检验。
 
They are the only leak detectors in their class offering qualitative leak detection starting at 100 hPa before reaching the inlet test pressure.
它们是该类别中唯一能提供定量化泄漏探测的泄漏探测器，定量化的起点为100 hPa，到达到进气检验压力为止。
The ASM 340 is characterized by its powerful pumping system and available in conventional or dry versions.
ASM 340以强大的泵送系统为其特征，而且有传统的或干式版本。
Easy operation, ultra fast response time and short recovery time are among the outstanding features of these compact multipurpose units.
易于操作、超快响应时间和较短恢复时间都是此等紧凑型多用途装置的卓越特性。
The ASM 340 is the perfect solution for everyday testing even in severe test conditions.
即使是在严苛检验情况下，ASM 340都是日常检验的理想解决方案。
ASM 340 with conventional pumping Those compact leak detectors are equipped with the largest backing pumps of their class allowing extremely fast cycle times.
ASM 340 带有传统的泵送系统。此等紧凑泄漏探测器配备有其同类别中最大的支持泵，使之有极短的循环周期。
ASM 340 D with dry pumps The dry ASM 340 D units are equipped with diaphragm pumps.
They are used in any applications where very clean test conditions are required.
带干式泵的ASM 340
干式ASM340 装置配备有隔膜泵。在任何需要非常清洁的检验情况下，均可以使用这种装置。
ASM 340 I without backing pump This specific unit offers maximum flexibility and is typically used for the integration into leak detection systems.
不带支持泵的ASM 340
这种特殊的装置提供了最大的弹性，主要用于集成到泄漏探测系统。
Customer benefits:
客户收益：
Fastest time to test in its class High backing pump capacity for versatile use Rapid response time due to high helium pumping speed Unique capability to detect leaks starting at 100 hPa Impressive results in sniffing test mode, with 5•10 -10 Pa m 3 /s minimum detectable leak rate for helium Low maintenance due to rugged design Integrated SD memory card for recording, downloading and parameter setting Detachable color control panel for enhanced ergonomics User friendly and customizable interface Complete range of I/O and Profibus communication available
在其类别当中，具有最短的检验时间；适合各种用途的高级支持泵容量；因高氦气泵送速度而带来的快速响应时间；探测从100 hPa起的泄漏的独一无二的能力；在嗅闻检验模式中令人印象深刻的结果；因氦气低维护而实现的5•10 -10 Pa m ³ /s最小可探测泄漏比率；因坚固设计集成的SD记忆存储卡而实现的记录、下载和参数设置；加强人机工程学应用的可分拆的彩色控制面板；用户友好型和定制的界面；可获的完整的输入/输出（I/O）和过程现场总线（Profibus）通信系统。
 
Applications
应用
R & D Aeronautic industry Mechanical engineering Measuring technology Refrigeration Air conditioning Semiconductor technology Leak detection systems
研究和开发、航空业、机械工程、测量技术、制冷、空调、半导体技术中所用的泄漏测试系统
The modular leak detector for easy and quick integration into industrial leak detection systems provides you with high performance, reliable and repeatable testing.
可用于简易快捷集成到工业泄漏探测系统的模块泄漏探测器能提供高性能的、可靠的和可重复的检验。
Leak Detectors for Industrial Leak Detection Systems Modular leak detectors were designed for integration into industrial leak detector systems.
用于工业泄漏探测系统的泄漏探测器，模块泄漏探测器的设计目的就是集成到工业泄漏探测系统。
They can be flexibly adapted to a wide range of leak detection applications and environments in the production of electrical and mechanical parts, such as for the automotive industry, and in evaporator and compressor production for refrigeration and air conditioning.
它们可以灵活地适应电气和机械部件生产过程中广泛范围的泄漏探测应用和环境，如汽车行业，以及适应制冷和空调行业蒸发器和压缩机生产过程中泄漏探测应用和环境。
The modular design and small footprint of the ASI 30 enables it to be easily integrated into existing systems.
ASI 30 的模块化设计及小占用空间使之可以容易集成到现有系统。
A particular feature is the leak detector's ease of use.
特别的特点就是泄漏探测者使用的简易性。
Its high reliability and short maintenance times are crucial for avoiding production downtimes and quality problems.
其高可靠性和短维护时间对避免生产中断和质量问题而言是关键的。
The ASI 30: flexible and reliable The ASI 30 modular leak detector is specially adapted to meet the requirements of machine builders and their end users.
ASI 30：有弹性和可靠性。ASI 30 模块特别适合于满足机器制造者及其终端用户需求的场合。
The modular design of this leak detector allows it to be integrated flexibly and easily into leak detection systems.
这种泄漏探测的模块化设计使之可以灵活便捷地集成到泄漏探测系统。
The vacuum module with its analyzer cell and calibrated test leak can be installed in any position.
The electronic module and the optional control panel are ready for inserting in half 19" racks.
带有分析仪单元和校准检验泄漏的真空模块可以在任何位置予以安装。电子模块和可选控制面板已经就绪，可以插入半19”机架当中。
They can be fitted in any part of the system or in a cabinet under controlled environmental conditions.
在可控的环境条件下，它们可以在系统的任何部分或在一个柜体内固定。
The leak detector can be controlled without a control panel simply through a PC or PLC as it has a wide range of interfaces and complies with all industrial standards.
泄漏探测器可以仅仅通过一台电脑或PLC（可编程序控制器）进行控制，而无需一个控制面板，因为它有范围广泛的界面，并符合所有有关工业标准。
The rugged design of the ASI 30 ensures long-term maximum availability of the unit under production conditions.
ASI 30的坚固设计确保了在生产条件下该装置的最大长期可获性。
 
多级泵：
Multi-stage Roots pumps by PV produce clean and dry vacuum for various applications and markets.
PV罗茨多级泵为各种应用和市场生产清洁和干燥真空环境。
The solution for clean and dry applications Multi-stage Roots pumps by PV are used in different areas of application.
作为清洁和干燥应用场合的解决方案，PV罗茨多级泵可用于不同的应用领域。
Small ACP-Roots pumps create, for example, the required fore-vacuum for turbopumps in particle accelerators.
小型ACP-罗茨泵能生产，例如，粒子加速器所用涡轮泵所需的前级真空。
Large ACP 120 with their high pumping speed and low final pressure are used in freeze-drying applications.
具有到泵送速度和低最终压力的大型ACP 120可用于冷冻干燥应用场合。
The A 100, A3P or A3H series dry pumps are used in large numbers as process pumps in the semiconductor and coating industry.
A 100、A3P或A3H系列干式泵作为过程泵可大量用于半导体和喷涂工业。
Nevertheless, all of these areas have one thing in common: they require a clean and dry vacuum.
The technology of the multi-stage Roots pumps is the perfect solution here.
然而，此等菱悦均有一个共同的特点：它们均需要清洁和干燥的真空环境。
Lubricants and sealing material between the rotor and stator are not required by the frictionless working pumping module.
无摩擦工作泵送环境不需要转子和定子之间的润滑剂和密封材料。
Thus, hydrocarbon vapor backstreaming can be avoided.
因此，可以避免烃类蒸汽的回流。
In the suction chamber of the pumps, no sealing materials are processed.
在泵的吸入室，无任何密封材料是被处理的。
This means the pumps are free of particles, extremely reliable and stable for a long period of time which results in low cost of ownership.
这意味着泵是没有颗粒物的，长期内均是非常可靠和稳定的，这将带来业主的低成本结果。
Areas of usage for multi-stage Roots pumps in clean processes Air-cooled multi-stage Roots pumps from the ACP series are very low maintenance and are distinguished through their constant performance.
在清洁过程中罗茨多级泵以及ACP系列的空气冷却罗茨多级泵的使用领域是需要极少维护的，凭其恒定的性能脱颖而出。
They are used in analytical applications as well as in clean processes for semiconductor production and plasma cleaning.
它们可用于分析应用场合以及半导体生产和等离子清洗行业的清洁过程当中。
The compact Roots pump A 100 L can be easily integrated in systems due to their small dimensions.
A 100 紧凑罗茨泵因其较小尺寸而可以便捷集成到有关系统。
Load locks and transfer chambers from semiconductor and photovoltaic production systems are typical areas of application for this type of pump.
半导体和光伏生产系统的负载锁和传输室是这种类型泵的典型应用领域。
The multi-stage Roots pumps with water cooling of the ACP 120 series are produced of robust die cast metal.
ACP 120 系列的带有水冷却的罗茨多级泵是用结实的模铸材料制成。
Just like the Roots vacuum pumping stations ACG 600, they are used in research and development, vacuum coating and metallurgy when high pumping speed is required.
就像罗茨真空泵送站ACG 600， 它们是用于需要较高泵送速度场合的研究、开发、真空喷涂和冶金行业的。
Aggressive applications are not a problem Multi-stage Roots pumps from the A3P series were developed for applications in medium duty processes for semiconductor and photovoltaic production, in which slightly corrosive gases or condensation must be transported.
具有侵略性的应用也不是问题，A3P系列的罗茨多级泵的开发目的就是为了半导体和光伏生产所需媒介材料过程应用的，在这种过程中轻微腐蚀性气体或冷凝物是必需被运输出来的。
The pumps are compact and energy-efficient.
此等泵是紧凑的和高能效的。
The low noise development and the low vibration level are outstanding characteristics of the series.
低噪音开发和低振动水平是该系列的突出特点。
The pumps of the A3H series with a pumping speed of up to 1,800 m 3 /h are made of corrosion resistant materials.
泵送速度可高达1,800 m³/h 的A3H系列泵是用防腐材料制成的。
Media tolerability also with high gas throughput make these multi-stage Roots pumps the best solution for usage in CVD-processes in the semiconductor industry.
媒介容忍度以及高气体生产量水平使此等罗茨多级泵成为半导体行业CVD过程应用的最佳解决方案。
 
Harsh duty processes in the semiconductor production always provide new challenges for vacuum pumps.
半导体生产中的严酷工作过程总是会向真空泵提出新的挑战。
Based on the proven technology of the dry multi-stage roots pumps, PV offers pump solutions with the A3H series with different pumping speeds for 300 mm-Fabs with 45 nm technology and less.
基于罗茨干式多级泵的被证实的技术，PV以A3H系列提供了泵解决方案，该方案以45 nm及更小的技术为300mm晶圆配备了不同的泵送速度。
 
A3H dry pumps for harsh duty processes Harsh duty processes in semiconductor production always provide new challenges for vacuum pumps.
用于半导体生产中严苛工作过程的A3H干式泵总是会向真空泵提出新的挑战。
 
Based on the proven multi-stage Roots technology, PV offers pump solutions with the A3H series with different pumping speeds for 300 mm-Fabs with 45 nm technology nodes and less.
基于罗茨多级泵的被证实的技术，PV以A3H系列提供了泵解决方案，该方案以45 nm及更小的技术为300mm晶圆配备了不同的泵送速度。
 
Compared to previous process pumps, the gas throughput, particle tolerance and condensation resistance have been increased significantly.
与以往过程泵比较，气体生产量、粒子容忍度和防冷凝已经得到显著提高。
Their multi-stage Roots technology guarantees a particle-free and dry vacuum.
其罗茨多级技术确保提供了无颗粒的干式泵。
The pumps are equipped with temperature sensors and inert gas flushing.
泵配备有温度传感器和惰性气体冲洗装置。
The optimal solution for the most demanding processes.
服务于最为需要的过程的可选解决方案
The dry pumps of the A3H series, through the use of corrosion-resistant materials, are optimal for demanding CVD processes in the semiconductor, photovoltaic or flat panel display production.
A3H系列干式泵，通过使用防腐蚀材料，是半导体、光伏或平板显示器生产中迫切需要CVD过程的可选解决方案。
The high gas throughput is another characteristic of the series.
高气体生产量是该系列的另一个特点。
A low noise emission and a low vibration level distinguish these multi-stage Roots pumps.
They are compliant with CE and Semi S2 standards.
较低噪音释放和较低振动水平使此等罗茨多级泵与众不同。
The A3H series for the most demanding processes saves operating costs The usage of these dry pumps supports a decrease in operating costs through low energy consumption.
服务与最为需要的过程的A3H系列节省了运营成本。此等干式泵的使用通过较低能量消耗实现对运营成本降低的支持。
Through the improved particle tolerance and the condensation resistance, the maintenance intervals and the lifetime of the pumps could be extended, which means an additional reduction of operating costs.
通过改进的粒子容忍度和防冷凝，维护间隔和泵的寿命是可以得到延长的，这意味着又一次运营成本的减少。
 
Advantages
优势
Longer maintenance intervals through improved particle tolerance and condensation resistance Optimal efficiency for demanding CVD processes through the use of more corrosion-resistant materials and high gas throughput Reduced operating costs through minimal energy consumption Minimal space needed through compact construction Low noise emission and low vibration level Compliant with CE and Semi S2 standards
通过改进的粒子容忍度和防冷凝而实现的更长维护间隔期；通过使用更好防腐蚀材料和高气体生产量而实现的服务于迫切需要的CVD过程的可选效率；通过最小化能量消耗而实现降低运营成本；通过紧凑结构设计实现只需最小的空间；低噪音释放和低振动水平；符合CE和Semi S27标准。
 
The multi-stage roots pumps of the ACP series are designated for oil- and particle free applications in the pressure range between atmospheres up to 3 x 10-2 hPa.
ACP系列罗茨多级泵的设计目的就是为了在压力范围为大气压力和3 x 10-2 hPa之间的无油无粒子应用场合的。
The air-cooled pumps are the optimal replacement for rotary vane pumps when used in residual gas analysis systems, electron microscopes or UHV-systems.
在用于剩余气体分析系统、电子显微镜或UHV系统的情况下，空气冷却泵是旋转叶片泵的最佳替代物。
 
Light duty processes require a clean and dry vacuum.
轻载过程需要一个清洁和干燥真空环境。
The multi-stage roots pumps by PV are the ideal solution for industrial applications and Research & Development.
PV罗茨多级泵是工业应用和研究开发场合下的理想解决方案。
Dry pumps for light duty processes Based on the proven technology of the dry multi-stage roots pumps, PV offers a wide selection of high power pumps for light duty processes.
服务与轻载过程的干式泵
基于罗茨干式多级泵的被证明技术，PV提供服务于轻载过程的高能泵的广泛选择方案。
The most important characteristics for pumps in these applications are a high pumping speed and robustness as well as high reliability.
此等应用中的泵的最重要的特点就是高泵送速度、健壮性和可靠性。
Air-cooled multi-stage roots pumps from the ACP series The multi-stage roots pumps of the ACP series are designated for oil- and particle free applications in the pressure range between atmospheres up to 3 x 10 -2 hPa.
ACP系列的罗茨空气冷却多级泵
ACP系列的罗茨多级泵设计目的就是为了在压力范围为大气压力和3 x 10-2 hPa之间的无油无粒子应用场合的。
 
 
The air-cooled pumps are the optimal replacement for rotary vane pumps when used in residual gas analysis systems, electron microscopes or UHV-systems.
在用于剩余气体分析系统、电子显微镜或UHV系统的情况下，空气冷却泵是旋转叶片泵的最佳替代物。
 
They are ideal as a roughing pump for turbomolecular pumps.
作为用于低真空泵，它们是用于涡轮分子泵的理想解决方案。
The specially developed G version of the pumps is designed for the transportation of traces of corrosive gases.
经过特别开发的此等泵的G版本的设计目的就是为了运输腐蚀性气体的残留。
This version of the ACP series is recommended for transfer chambers, process monitoring systems and ion beam applications.
ACP系列版本是推荐用于运输室、过程监视系统和离子束应用场合的。
The CV version of the air-cooled ACP series has a water vapor capacity of up to 1,000 grams per hour.
空气冷却ACP系列的CV版本具有的水蒸汽容量可达1,000g/h。
It is designed to avoid steam condensation in the pump block.
其设计就是为了避免泵体内的蒸汽冷凝。
ACP 120 and ACG 600 for industrial applications Based on the tens of thousands of semiconductor process pumps installed worldwide, the ACP 120 provides the advantages of the multi-stage roots pumps in industrial applications as well.
用于工业应用场合的ACP 120和ACG 600
基于安装于全世界范围的上万台半导体过程泵的应用实践，ACP 120也具备了工业应用中罗茨多级泵的优点。
The water-cooled pump can be obtained as a standard version for light duty applications as well as a purge gas version for slightly corrosive processes or for pumping down condensable mediums.
水冷却泵可以作为用于轻载应用版本而获得，也可以作为浪涌气体版本用于轻微腐蚀性过程的应用场合，或者用于泵送可冷凝介质的应用场合。
The ACP 120 can be combined into different pumping stations with roots pumps.
ACP 120 可以组合进带罗茨泵的不同泵送站。
The roots pumping station ACG 600 may be the basis of a completely lubricant-free pumping system for vacuum solutions in the decorative or tool coating.
罗茨泵送站ACG 600可以是用于装饰或工具喷涂真空解决方案的一个完整的免润滑泵送系统的基础。
The compact dry pump: the A 100 L The compact dry pump A 100 L was developed for the cost-saving integration in semiconductor production systems.
紧凑型干式泵：A100 L
紧凑型干式泵A 100 L的开发目的就是为了应用于半导体生产系统的节约成本的集成方案。
 
The multi-stage roots pump is suitable for usage in clean rooms and can replace external pumps with a significantly higher pumping speed.
罗茨多级泵适合于清洁空间应用场合，而且能够以可观的更高泵送速度替换外部泵。
Through variably adjustable speeds in the standby mode, the power consumption of the compact dry pump A 100 L can be additionally lowered.
通过调整备用模式中的可调速度，紧凑型干式泵A 100 L的能量消耗是进一步得到降低。
 
Integrated pumps of the A100 series for light duty processes The pumps of the A100 series with their compact dimensions were specifically developed for flexible integration in semiconductor production facilities.
服务于轻载过程的A100系列的集成泵
具有紧凑结构尺寸的A100系列泵是为半导体工厂中弹性集成而专门开发。
Designed for installation directly on the tool and fast pump down, this series of compact pumps for light applications is the perfect solution for load-lock and transfer chambers as well as for all other non-corrosive applications.
设计为直接在工具上安装和快速的泵送，该系列用于轻载应用的紧凑型泵是负载锁、运输室以及其他非腐蚀性应用的完美解决方案。
 
Integrated pumps set standards Since the market integration of the A 100 L pumps, they have revolutionized the integration of pumps in production facilities for the semiconductor industry.
集成泵设定了有关标准。鉴于A 100 L泵的市场集成，它们革新了服务于半导体行业生产设施的多泵集成方案。
Based on dry multi-stage Roots technology and despite their small dimensions, the pumps of the A100 series offer high pumping speeds and short pump down times.
基于罗茨干式多级泵技术，尽管只有较小尺寸，A 100 系列泵提供了高泵送速度和短泵送时间。
Today, integrated light duty pumps are state of the art and the A100 series is installed worldwide in many 300 mm semiconductor fabs.
今天，集成轻载泵是最先进的，A100系列是在全世界范围许多300 mm半导体晶圆工厂内安装的。
Integrated pumps for load-lock and transfer chambers In light duty applications like load-lock and transfer chambers, these pumps rule out vacuum line effects in pump installations.
在轻载应用场合服务于负载锁和运输室的集成泵清除了泵安装中的真空线路效应的影响。
Installation costs for vacuum lines, integration and commissioning are lowered through the use of the A100 series.
通过使用A100 系列，可以降低真空线路、集成和调试的安装成本。

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